Vacuum Rated Motors

Vacuum Rated Motor

IP RATINGS | IPX7 | LAB RATED | TEMPERATURE RATED|

Vacuum Rated Motors
Features and Benefits:
    While our standard line of stepper motors are known for their durability, some applications require a bit more than standard protection. The vacuum rated stepper motors from Lin Engineering are manufactured to operate in cleanroom environments where outgassing needs to be avoided. Please see below for more information and request a quote to get started!

Products

While our standard line of stepper motors are known for their durability, some applications require a bit more than standard protection. The vacuum rated stepper motors from Lin Engineering are manufactured to operate in cleanroom environments where outgassing needs to be avoided. Please see below for more information .

Features

• Vacuum Ratings up to 10-7 Torr at 125°C
• Special windings and teflon leads utilized

Popular Applications

Semiconductor environments

Optics environments

Satellites

 


The following motors are available as vacuum rated:

 

211_NEMA11_Vacuum_Motors211 Series

Vacuum Rated Motor Up to
16.6 oz-in (0.12 N-m) Holding Torque

4118_NEMA17_Vacuum_Motors4118 Series

Vacuum Rated Motor Up to
125 oz-in (0.88 N-m) Holding Torque

5718_NEMA23_Vacuum_Motors5718 Series

Vacuum Rated Motor Up to
294 oz-in (2.08 N-m) Holding Torque




The vacuum rated motor comes in several different sizes, depending on your applications torque and speed requirements. All the paints and oils are removed from the motor. Next, high temperature windings are utilized as well as Teflon leads.

A customized cleaning process combined with a vacuum bake-out is used to encourage outgassing of residual contaminants. Vacuum lubricated Bearings are rated from -80°C to 204°C which translates to a maximum motor external body temperature of 125°C. Prior to being shipped, all motors are wrapped in a clean room cloth and sealed air-tight. Special handling and care must be taken once package has been opened. This also passes Class 10 clean room requirements.

Depending on your chamber size and vacuum pump rate, these motors should be able to reach up to 10-Torr at 125°C. Motors were tested in a chamber size of 1 Liter at a pressure rate of 1 mL/mm.
ZH417_Vacuum
Ask about custom motors for vacuum appplications

HOW CLEAN IS CLEAN?

Evaluation

Measurement of Outgases

Test Setup


Vacuum_Test_Setup-1
Vacuum_Test_Setup-2


Test Process

A test motor was put into a positive flow chamber (N2 Gas flow 1mm/1min) and we measured the outgassing levels over 72 hours at a temperature of 125°C
The measurements taken were:
• Total Mass Loss Percentage (%TML)
• Total Mass Loss (ug/motor)

For more details, ask Lin Engineering

Test Result

SAMPLE% TOTAL MASS LOSS
(TML)
MASS LOSS
(ug/motor)
Competitor0.030105,000
Lin Engineering0.00829,000

Definitions

%TML: Percentage of Total Mass Loss. The larger the
percentage, the “contaminated” the specimen is.
Mass Loss (ug/motor): The weight of the mass that was evaporated into the chamber from the specimen. The larger the number, the “contaminated” the specimen is.

Conclusion

Lin Engineering's cleaning process in 375% cleaner than the competition.